Heraeus Black Quartz (HBQ®) is a unique black opaque quartz glass composite that benefits from high purity and other properties of our advanced white opaque (OM®) and clear fused (HSQ®) quartz solutions. HBQ® offers smart answers to individual problems, and new answers to old material challenges. Convince yourself and step into a new world of possibilities with Heraeus Black Quartz.
Heraeus Black Quartz (HBQ®)
Step into a new world of possibilities
A revolutionary hybrid material
Available Product Solutions
The manufacturing method of HBQ® allows it to be manufactured close to the dimensions of the finished component. This reduces excess material and lowers machining steps. This improved efficiency in manufacturing contributes to a lower cost for the finished part.
For available dimensions and possible maximal dimensions please contact us.
HBQ® is available as a full body ingot material in solid round format. The outer diameter and height can be tailored to customer requests.
Heraeus can provide HBQ® in square or rectangular ingots. Typical dimensions like length, width and height can be adjusted according to requirement.
HBQ® is also available as a ring, which can be tailored to custom dimensions for maximum material efficiency in ring or cylinder applications.
Benefits of HBQ®
- Semiconductor applications for single and multi-wafer process chambers HBQ Wafer
- Thermal homogenization of process environment
- Blocking of radiation from certain process environments
- Heating element covers, shielding plates, pedestal plates, dummy wafers, wafer holders, etc.
Density: 2.19 g/cm3
Pore size: <10µm
Resistivity (20°C): >1015 Ω∙m
Resistivity (1200°C): >1000 Ω∙m
Dielectric constant (εr) @ 13,56 MHz: 3.82
Tensile strength: 50 MPa
Flexural strength: 84 MPa
Compressive strength: >1000 MPa
Young modulus: 54 GPa
Thermal expansion (20-200°C): 0,57 x 10-6 K-1
Thermal conductivity (20°C): 1.49 W∙m-1∙K-1
Max. working temperature: 1160 °C (long), 1300 °C (short)
Emissivity @ 1000°C: 80-90%