- Minimized impurities and inclusions
- Optimized process yield and performance
- Improved total cost of ownership
Heraeus Neonyx® - The New Synthetic Quartz Standard
Redefining Quartz Materials: A New Material Platform
Benefits of Neonyx®
Neonyx® Synthetic Fused Silica Portfolio
Developed for your batch furnace applications, Neonxy HSQ-T offers you all the benefits of Heraeus HSQ combined with the advanced properties of synthetic quartz material, while keeping the available product portfolio unchanged. Neonyx HSQ-T is available as large diameter tube, small diameter tube, rod, ingot, plates, etc. to enable you to create a full batch furnace set from the same material grade: Neonyx HSQ-T!
The material grade for next generation single wafer applications: Neonyx TSC-T. The superior properties of the established high performance materials TSC-3/4 are exceeded by Neonyx TSC-T, offering uniquely low levels of bubbles and materials inclusions to address the challenges of your high-end single wafer applications.
Fields of Applications
Deposition and etching processes are one of the most critical processes in the semiconductor manufacturing chain. The on-going integration into the third dimension is presenting new and increasingly challenging requirements. Neonyx is the right material for these challenges. Read more about more about the specific processes below.