Fused Quartz and Silica Products for Semiconductor Applications

Fused quartz and silica is a key material in a multitude of applications in the semiconductor industry. Learn more about how to find the best fused quartz and silica for your semiconductor application.

Heraeus Conamic manufactures fused quartz and silica products for semiconductor applications in a variety of material grades and dimensions. The provided products are characterized by high purity and material homogeneity while maintaining low bubble contents and tight dimensional tolerances.

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Product Portfolio for Semiconductor Applications

The product portfolio of Heraeus Conamic for semiconductor applications can be separated into two main areas of expertise depending on the grade of fabrication involved:

The Quartz Base Materials represent the basic product geometries made from fused quartz and silica like ingots, rods, tubes, plates and more. In this field Heraeus Conamic provides products in a standardized form that can already be matched to the final application in certain geometrical dimension like outer diameter, wall thickness or length.

In the area of Fabricated Quartzware, Heraeus Conamic is providing fused quartz and silica products further machined to the final application as per drawing. This enables the customer to receive Fabricated Quartzware in the final geometries from the hands of one expert provider. Fabricated Quartzware can be distinguished by the production type of the final semiconductor applications:

Quartzware for Single Wafer Applications

Quartzware for Single Wafer Applications

Heraeus Conamic can provide quartzware for all typical single wafer applications such as rings, windows, domes, liners and more for all relevant semiconductor processes. Solutions are available for processing wafers from 6 inch up to 12 inch (others on request).

To ensure optimum performance of the final quartzware it is detrimental to choose the appropriate base material, surface morphology and cleanness. Heraeus Conamic can offer design support via our worldwide fabrication network connecting you with the experts in this field.

Quartzware for Batch Furnace

Quartzware for Batch Furnace

Regarding batch furnace applications, Heraeus Conamic can offer quartzware for all typical batch applications such as CVD, epitaxial deposition and other high-temperature processes. Product examples for batch systems are process tubes, liners, pedestals, gas injectors and many more complex components. Solutions are available for processing wafers from 4 inch up to 12 inch.

Heraeus Conamic can also provide quartzware ready for install (CFI) enabling our customers to use our products directly after delivery and without any further treatment.

To ensure optimum performance of the final quartzware Heraeus Conamic can offer design support via our worldwide fabrication network connecting you with the experts in this field.

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Material Grades for Semiconductor Applications

The provided material grades of fused quartz and silica can be classified by the underlying production technology used for manufacturing the final products. In the following you can find an overview of the different material grades that Heraeus Conamic can offer, highlighted by the key feature in this application segment:

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