Crosslinkers are an integral product for the semiconductor industry. In conjunction with polymers, crosslinkers bind polymer chains together to produce the photoresist solution essential to memory and logic chip manufacturing.
Hereaeus has been working with our customers for over 30 years to achieve the highest possible standards, making your processes and products easy to scale whilst safeguarding your intellectual property.
Heraeus Epurio has a long tradition of manufacturing crosslinkers based on glycoluril in highest purity for semiconductor resists. We have developed processes which enable us to control formaldehyde and methylene chloride contamination at any scale of production.
A new, cleaner standard
The low metal contamination and the methylene chloride- and formaldehyde-free products from Heraeus define the new standard in semiconductor industry. Various chemical modifications have brought the sublimation tendency to a very low level. We reduce metal impurities to less than 10 pbb each, which is crucial in the production of increasingly smaller memory and logic chips.
Working with the customer
In close cooperation with our customers, Heraeus Epurio customizes crosslinkers to suit your individual manufacturing needs.