Deep UV PAG (Photo Acid Generators)

Based on 30 years of experience in producing electronic-grade photoactive materials as Daychem Laboratories in Dayton (OH), Heraeus has put together selected chromophores together with vintage acids to create different classes of unique products for critical layer resists in highest resolution.

Most of these products are available in Ultra-Pure (UP) quality with purity above 99.5% and content of all 26 metals below 10 ppb. This makes even conventional chemistry available for new frontiers in resist resolution.

Products

Ionic PAG Strong bulky acid

PA-253

PA-253

CAS Registry Number: 2220251-66-9

Properties:

  • Strong acid generation m.p. 128~9°C
  • High solubility (>20% in PGMEA)

Features:

ArF

Ionic PAG C1 acid

TPS-C1

TPS-C1

CAS Registry Number: 393110-05-9

Properties:

  • Strong acid(C1) generation
  • m.p. 76~78 °C

Features:

Deep UV

TTBPS-C1

TTBPS-C1

CAS Registry Number: 476315-65-8

Properties:

  • Strong acid(C1) generation
  • m.p. 164~165 °C

Features:

Deep UV

DTBPIO-C1

DTBPIO-C1

CAS Registry Number: 524067-95-6

Properties:

  • Strong acid(C1) generation
  • m.p. 104~105 °C

Features:

Deep UV

Ionic PAG – N3 acid

TPS-N3

TPS-N3

CAS Registry Number: 808752-25-2

Properties:

  • Strong acid(N3) generation
  • m.p. 104~105 °C

Features: Deep UV

TDPS-N3

TDPS-N3

CAS Registry Number: 862261-51-6

Properties:

  • Strong acid(N3) generation
  • m.p. 83~85 °C

Features: Deep UV

TBPDPS-N3

TBPDPS-N3

CAS Registry Number: 862261-52-7

Properties:

  • Strong acid(N3) generation
  • m.p. 114~116 °C

Features: Deep UV

TBPTMS-N3

TBPTMS-N3

CAS Registry Number: 1370509-91-3

Properties:

  • Strong acid(N3) generation
  • m.p. 177~178 °C

Features:

Deep UV

PA-289

PA-289

CAS Registry Number: 1639063-05-0

Properties:

  • Strong acid (N3) generation
  • m.p. 154-155 °C

Features:

Deep UV

Ionic PAG – Nf acid

TPS-Nf

TPS-Nf

CAS Registry Number: 144317-44-2

Properties: Low diffusion strong acid(nonaflic acid) generation m.p. 84~88°C

Features: Deep UV

TBPDPS-Nf (PA-271)

TBPDPS-Nf (PA-271)

CAS Registry Number: 258872-05-8

Properties: Low diffusion strong acid(nonaflic acid) generation m.p. 131~137°C

Features: Deep UV

TBPTMS-Nf (PA-282)

TBPTMS-Nf (PA-282)

CAS Registry Number: 900188-13-8

Properties: Low diffusion strong acid(nonaflic acid) generation m.p. 174~176°C

Features: Deep UV

DTBPIO-Nf (PA-233)

DTBPIO-Nf (PA-233)

CAS Registry Number: 194999-85-4

Properties:

  • Low diffusion strong acid (nonaflic acid) generation
  • m.p. 175~177 °C

Features: Deep UV

DTBPIO-N1

DTBPIO-N1

CAS Registry Number: 460731-32-2

Properties:

  • Strong acid(N1) generation
  • m.p.153~155 °C

Features: Deep UV

Ionic PAG – other acids

BTPSPFBDS

BTPSPFBDS

CAS Registry Number: 848407-98-7

Properties:

  • Strong acid (perfluorobutane disulfonicacid) generation
  • m.p. 157~159 °C

Features: Deep UV

TPS-TFMBS

TPS-TFMBS

CAS Registry Number: 425670-97-9

Properties:

  • Weak acid (o-trifluoromethylbenzenesulfonic acid) generation
  • m.p. 156~157 °C

Features: Deep UV

DTBPIO-TFMBS

DTBPIO-TFMBS

CAS Registry Number: 229325-98-8

Properties:

  • Weak acid (o-trifluoromethylbenzenesulfonic acid) generation

Features: Deep UV

DTBPIO-CS

DTBPIO-CS

CAS Registry Number: 193345-23-2

Properties:

  • Weak acid (camphorsulfonic acid) generation
  • m.p. 215~217 °C

Features: Deep UV

DTBPIOPFBDS

DTBPIOPFBDS

CAS Registry Number: 799274-55-8

Properties:

  • Strong acid (perfluorobutane disulfonic acid) generation
  • m.p. 175~176 °C

Features: Deep UV

Non-ionic DUV PAG

MDT

MDT

CAS Registry Number: 133710-62-0

Properties:

  • White powder
  • Strong acid (triflic acid) generation
  • m.p. 88~89 °C

Features: Deep UV

PA-229

PA-229

CAS Registry Number: 307531-76-6

Properties:

  • White powder
  • Low diffusion strong acid (nonaflic acid) generation
  • m.p. 54~56 °C

Features: Deep UV