Based on 30 years of experience in producing electronic-grade photoactive materials as Daychem Laboratories in Dayton (OH), Heraeus has put together selected chromophores together with vintage acids to create different classes of unique products for critical layer resists in highest resolution.
Most of these products are available in Ultra-Pure (UP) quality with purity above 99.5% and content of all 26 metals below 10 ppb. This makes even conventional chemistry available for new frontiers in resist resolution.