I-Line and Broadband PAG

Following the growing market demand for highly sensitive, high solubility i-line PAG for various chemical amplified resist applications, Heraeus developed a set of i-line, broadband and even g-line products.

Purity is according to the proven electronic grade quality of Heraeus, and most of the PAGs are scaled up cost-effectively in production to deliver up to tons quantity per year, making them also attractive for cutting-edge devices for memory chips, advanced packaging and display resists.

Standard i-line PAGs

NIT

NIT

CAS Registry Number: 85342-62-7

Properties:

  • White powder
  • Strong acid (triflic acid) generation
  • m.p. 210~214 °C

Features: i-line

NIN

NIN

CAS Registry Number: 171417-91-7

Properties:

  • White crystalline powder
  • Low diffusion
  • Strong acid (nonaflic acid) generation
  • m.p. 148.5~149.5 °C

Features: i-line

ILP-110

ILP-110

CAS Registry Number: 2004734-94-3

Properties:

  • Light-yellow powder
  • Strong acid (triflic acid) generation
  • m.p. 113~114 °C

Features: i-line

ILP-110N

ILP-110N

CAS Registry Number: 2004734-96-5

Properties:

  • Low diffusion strong acid (nonaflic acid) generation
  • m.p. 122~124 °C

Features: i-line

ILP-118

ILP-118

CAS Registry Number: 2004734-99-8

Properties:

  • Light-yellow powder
  • Strong acid (triflic acid) generation
  • m.p. 66~68 °C

Features: i-line

i, g, h-line PAGs

ILP-191

ILP-191

CAS Registry Number: 2081981-14-6

Properties:

  • Yellow powder
  • Strong acid (triflic acid) generation
  • m.p. 183~184 °C

Features: i, h-line broadband

ILP-113

ILP-191

CAS Registry Number: 1887001-94-6

Properties:

  • Yellow powder
  • Strong acid (triflic acid) generation
  • m.p. 125~126 °C

Features: i, h-line broadband

HTPG-104S

HTPG-104S

CAS Registry Number: 3584-23-4

Properties:

  • White powder
  • Strong acid (HCI) generation
  • m.p. 143~145 °C

Features: i, h-line broadband

PA-223

PA-223

CAS Registry Number: 2081981-19-1

Properties:

  • Orange powder
  • Strong acid (triflic acid) generation
  • m.p. 146~147 °C

Features: i, h, g-line broadband