Following the growing market demand for highly sensitive, high solubility i-line PAG for various chemical amplified resist applications, Heraeus developed a set of i-line, broadband and even g-line products.
Purity is according to the proven electronic grade quality of Heraeus, and most of the PAGs are scaled up cost-effectively in production to deliver up to tons quantity per year, making them also attractive for cutting-edge devices for memory chips, advanced packaging and display resists.
Regular product
CAS Registry Number: 85342-62-7
Properties:
Features: i-line
Regular product
CAS Registry Number: 171417-91-7
Properties:
Features: i-line
CAS Registry Number: 2004734-94-3
Properties:
Features: i-line
Regular product
CAS Registry Number: 2004734-96-5
Properties:
Features: i-line
CAS Registry Number: 2004734-99-8
Properties:
Features: i-line
CAS Registry Number: 1887001-94-6
Properties:
Features: i, h-line broadband
Regular product
CAS Registry Number: 3584-23-4
Properties:
Features: i-line
