Thermal Acid Generators

With thicker film resist demands, more and more formulations contain thermal acid generators to enable final curing during post-baking.
An IP-free set of products with different acidreleasing temperatures is available from Heraeus. Semiconductor-grade purity and effective costs are mandatory in the final application.

Products

TA-101

TA-101

CAS Registry Number: 4450-68-4

Properties:

  • White powder 4.5 % (w/w) in PGMEA
  • m.p. 101~102 °C

TA-102

TA-102

CAS Registry Number: 1942919-69-8

Properties:

  • White powder 2.5 % (w/w) in PGMEA
  • m.p. 126~127 °C

TA-103

TA-103

CAS Registry Number: 1942919-70-1

Properties:

  • White powder 5 % (w/w) in PGMEA
  • m.p. 101~102 °C