Thermal Acid Generators
With thicker film resist demands, more and more formulations contain thermal acid generators to enable final curing during post-baking.
An IP-free set of products with different acidreleasing temperatures is available from Heraeus. Semiconductor-grade purity and effective costs are mandatory in the final application.
TA-101
Regular product
CAS Registry Number: 4450-68-4
Properties:
- White powder 4.5 % (w/w) in PGMEA
- m.p. 101~102 °C
TA-102
CAS Registry Number: 1942919-69-8
Properties:
- White powder 2.5 % (w/w) in PGMEA
- m.p. 126~127 °C
TA-103
CAS Registry Number: 1942919-70-1
Properties:
- White powder 5 % (w/w) in PGMEA
- m.p. 101~102 °C