Miniaturization is playing an increasingly important role in the fields of medical applications, diagnostics and wearables as well as in the automotive and industrial environments. With a direct recording of inflammatory parameters on the patient, irregular conditions can be detected very early in the post-operative care, for example. Film sensors open up a very wide range of applications by recording parameters such as pH value, conductivity, humidity, pressure and temperature. Precise temperature measurement is of central importance both as a measurand and as a reference value for other sensors.
As part of a strategic cooperation, temperature sensor expert Heraeus Nexensos and film sensor expert accensors will jointly develop solutions to support the trend of miniaturization and integrate precise temperature sensor elements into highly integrable film sensor elements and application-specific film sensors. In particular, miniaturized temperature sensors of the microRTD series are used, which enable new applications with a footprint of only 0.6 × 0.3 mm and a height of less than 40 μm. The low height of the innovative temperature sensors thus allows direct integration into film sensors in order to achieve precise and direct detection of the temperature. In combination with ultra-thin films with material thicknesses of 12 μm, extremely flat film sensor systems with a total profile of less than 100 μm can be realized.