Quartzware for Single Wafer Applications

Fabricated Components for single wafer applications

Heraeus can provide quartzware for all of the common single wafer applications such as Rings, Windows, GDPs, Injectors, Domes, Liners for CVD, RTP / RTO, EPI and Etch processes.

Solutions are available for processing 4 inch up to 18 inch wafers.

Being vertically integrated Heraeus has in-house access to a variety of base materials to meet specific customer needs.

Optimum performance of the quartzware is determined by design support , choosing the appropriate base material , surface morphology and cleanliness. Heraeus offers design assistance through our worldwide fabrication network.

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