HBQ®100 is a black opaque high purity quartz glass composite. Its key value addition to the well known white opaque (OM®100) and clear fused (HSQ®300) quartz solutions in the market are especially the high absorption of ultra-violet (UV) radiation up to medium-wave infrared (MWIR) radiation. Optical emissivity of HBQ®100 is designed to mimick that of silicon: together with increasing temperature, emissivity rises up to almost the value of an optimal black body radiator. On the contrary thermal conductivity – among most other physical properties – is matching that of typical high purity fused silica materials, e.g. HSQ®300 .
The components of HBQ®100 were selected in such way, that contamination and influence even from the most sensitive process environments in the semiconductor industry are avoided and HBQ®100 is also suitable for high-end semiconductor processes.
Therefore HBQ®100 constists only of silicon dioxide (fused quartz) and high purity, elementary silicon. The addition of substances such as carbon, iron, titanium or copper is avoided.