Optical Materials for UV Applications

Optical Materials for UV Applications

The focus is on the wavelength from
180 – 400 nm:

  • VUV: < 190 nm
  • DUV: 190 – 280 nm
  • UV: 280 – 400 nm

The most important optical properties for this wavelength region are high transmission and excellent purity, no fluorescence, outstanding damage resistance against UV or other high-energy radiation. Typical applications in the UV wavelength region include: Microlithography, Spectroscopy, Laser Fusion projects, or other applications irradiated by Excimer laser or UV lamps.

Fused silica_3D material
Beam path in a retro reflector/ Challenges: Backreflection in the same direction.

Prisms, lenses and beam splitters are typically the most critical optical elements. The quality of these components contribute significantly to the performance of the entire optical system, since they influence the imaging performance by altering the optical path. In such optical elements the light path is not just in one direction, and therefore it is important that there is no optical distortion in any propagation direction. This makes an isotropic optical material with a homogenous refractive index distribution necessary. Heraeus Quarzglas has a unique process to provide real 3D materials with outstanding optical properties.
More information on 3D materials

Recommended Materials:
We recommend the following materials for their 3D homogeneity (indicated by +, ++, +++). To help with the selection, we indicate additional information. Never the less, feel free to contact our experts.

  • Suprasil 311 (3D:+++)
  • Suprasil 3301 (highest VUV transmission, 3D:+++)
  • Suprasil 1 (good radiation hardness, low fluorescence, 3D:++)
  • Suprasil 1 ArF/KrF (highest radiation hardness, lowest fluorescence, 3D:++)
Fused silica ingot
Typical window out of fused silica

Optical components like windows, filters, polarizers or light guides require the light to pass through the functional direction with minimized distortions. Optics (mostly plano-plano) out of fused silica have an excellent homogeneity and can be used for a wide range of applications - not just as a transmissive window in harsh environments, also as base material for optical filters and polarizers.


Recommended Materials:
We recommend the following materials for their homogeneity in functional direction (indicated by +, ++, +++). To help with the selection, we indicate additional information. Never the less, feel free to contact our experts.

  • Suprasil® 312 (basic material, homogeneity: +++)
  • Suprasil® 3302 (improved VUV transmission, homogeneity: +++)
  • Suprasil® 2A (good radiation hardness and low fluorescence, homogeneity: ++)
  • Suprasil® 2 ArF/KrF (highest radiation hardness and lowest fluorescence, homogeneity: ++)
  • Suprasil® 2B (good radiation hardness and low fluorescence, homogeneity: +)
  • Spectrosil® 2000 (low fluorescence, homogeneity:+) Data Sheet
  • Suprasil® UVL (highest radiation hardness and lowest fluorescence, homogeneity:+) Data Sheet

Mirrors, Wafers, Debris Shields and Substrates all rely on either the surface, or a very thin layer of material. Optical homogeneity is not the prime focus for these applications. Optical parameters like excellent transmission, very good coefficient of thermal expansion and other mechanical, thermal and chemical properties might be more important.

Recommended Materials:

Fused silica lens and blank
Customer tailored optical components

Todays optical components are by fare no standard optics anymore. Driven by the complexity of the applications in industry and science, specifications are much tighter, dimensions can be very imaginative, and sizes can go up to 1,5m. Heraeus Quarzglas was involved in a lot of projetcs, where a customer tailored optical component was required. Our long term R&D expertise enables us to support you in every unusual, special optics request.

Please contact us directly to discuss you problem and find a solution.

HOD® fused silica diffusor

For some optical components non-transparent fused silica can be used.

A diffusor with a performance close to the ideal diffusor has many applications, be it in reflection or transmission orientation. Heraeus HOD® offers very good performance over a broad angular distribution, is easy to clean, machinable, inert as transparent fused silica and can be made resistant to UV radiation.

More information on HOD ®

Data sheet:HOD® – High Purity Fused Silica Diffusor

Another non-transparent optic component is an absorber. Heraeus has developed a special fused silica, that is intentionally doped to absorb over a broad wavelength region. It appears black and is frequently used in spectroscopy applications. If cut very thin, it can be used as a strong attenuator for high intensity radiation.

Please feel free to contact our experts for additional information!

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