The focus is on the wavelength from
180 – 400 nm:
- VUV: < 190 nm
- DUV: 190 – 280 nm
- UV: 280 – 400 nm
The most important optical properties for this wavelength region are high transmission and excellent purity, no fluorescence, outstanding damage resistance against UV or other high-energy radiation. Typical applications in the UV wavelength region include: Microlithography, Spectroscopy, Laser Fusion projects, or other applications irradiated by Excimer laser or UV lamps.