Fused quartz plates and discs are needed in the semiconductor industry for the fabrication of boats, pedestals, wafers and wafer carriers, for batch processing equipment .
For single wafer processing equipment, plates are used to make windows, gas distribution plates, shower plates, wafer carriers and susceptors. In wet cleaning processes the material is used for tanks.
Large plates are also used in Flat panel display (FPD) manufacturing.
Heraeus provides a variety of material grades to satisfy the visual quality, size, shape and purity requirements of the semiconductor industry.